High performance germanium photodetectors integrated on submicron silicon waveguides by low temperature wafer bonding.
نویسندگان
چکیده
We demonstrate germanium photodetectors integrated on submicron silicon waveguides fabricated with a low temperature ( 0.4 A/W and an estimated quantum efficiency of above 90%.
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عنوان ژورنال:
- Optics express
دوره 16 15 شماره
صفحات -
تاریخ انتشار 2008